Item type:Publication,

Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography.

Severi, Joren
; 
De Simone, Danilo
; 
De Gendt, Stefan

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2020-12-12T00:00:00Z

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Publications 2

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testal.pdf
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2024-04-04-add-item-with-public-file (2).numbers
Unknown, 98.08 KB

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High NA EUV lithography, dielectric response spectroscopy, glass transition temperature

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https://or7-test.atmire.com/handle/123456789/1136

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